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Home / Industry/ High Temperature / Furnaces for Semiconductors

FURNACES FOR SEMICONDUCTORS

Furnaces for semiconductor applications, diffusion, oxidation, LPCVD, among others

Tystar is a manufacturer specializing in furnaces for semiconductor applications. With over 30 years of experience, it produces systems used in the production of solar cells, MEMS, optical devices, carbon nanotubes, nanowires and many others.

Main Systems:

Mini Tytan System

Mini Tytan furnace systems have been developed for diffusion, oxidation and LPCVD applications. The systems are designed to require less space and electricity than conventional ovens of the same capacity. The Mini series has been well accepted by both the industry and the scientific community as a reliable process tool. The system offers superior performance and process uniformity. The design incorporates several of the more advanced concepts needed for high-performance wafer processing. Some advantages of the systems are:

  • Reduced size for full loads of 50 to 100 wafers
  • Extremely high process uniformities
  • Activity performance greater than 95%
  • Large installed customer base
  • Electricity savings of up to 50%

General Purpose System

Tytan Standard systems are designed for diffusion, oxidation and LPCVD applications. The systems are compact and suitable for use in manufacturing and / or R&D environments. The Padrão series was well accepted as a reliable process tool, both in the industry and in the R&D community. They offer superior performance and process uniformity. The design incorporates several of the more advanced concepts needed for high-performance wafer processing tools. The advantages of the systems are:

  • Extremely high process uniformities
  • Activity performance greater than 95%
  • Large installed customer base
  • Capacity up to 8/200 mm
  • Electricity savings of up to 50%

Nano System

The TYTAN Nano series ovens were developed for the production and / or processing of nano materials. They can be for laboratory scale research, semi-production or mass production of nanomaterials, depending on the model and configurations.

A variety of nano materials are produced by Tystar customers. Carbon nanotubes (CNTs) can be produced in the form of single-walled carbon nano tubes (SWCNT) or multi-walled carbon nano tubes (MWCNT). Graphenes can be deposited on a wafer, in a single layer or in a multilayer thickness. Nano wires can be grown with a variety of different materials. Tystar Nano series ovens are useful tools for the production of:

  • CNT or VACNT vertically aligned up to a few mm
  • Horizontally aligned CNT (HACNT)
  • Tangled CNT (or similar to cotton)
  • Vertically aligned nanowires
  • Nanowires horizontally aligned
  • Randomly Oriented
  • Nanowires
  • Graphenes
    Graphene oxide
  • Other nano materials

Bench Top System

TYTAN bench ovens are designed to provide high quality resistance-heated thermal processing with an optimized budget. The systems offer phenomenal performance and are repeatable with tight control. All interface software and data tracking / status display / recipe management offer perfect user usability, and the systems are very safe and durable, with the addition of several desirable features:

  • Compact system
  • Low energy consumption
  • Flexible design – allows easy customization as needs change
  • Simple quartz replacement procedures
  • Flexible design capable of processing 4, 5, 6 and / or more wafers without changing quartz.

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